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ISO14644
Selected airborne particulate cleanliness classes for cleanrooms and clean zomes
ISO
Classification
number
Maximum concentration limits (particles/m3 of air) for particles equal to and larger than the considered sizes shown below (conceptration limits are calculated in accordance with equation(1) in 3.2)
0.1um
0.2um
0.3um
0.5um
1um
5um
ISO class1
10
2
ISO class2
100
24
10
4
ISO class3
1000
237
102
35
8
ISO class4
10000
2370
1020
352
83
ISO class5
100000
23700
10200
3520
832
29
ISO class6
1000000
237000
102000
35200
8320
293
ISO class7
352000
83200
2930
ISO class8
3520000
832000
29300
ISO class9
35200000
8320000
293000
NOTE Uncertainties related to the measurement process require that concentration date with no more than three significant figures be used in determining the classification level

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